Authors

Li, Li; Zou, Gang; Bender, Hugo; Mertens, Paul; Meuris, Marc; Schmidt, Harald; Heyns, Marc

Conference

Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Improvement and evaluation of drying techniques for HF-last wafer cleaning

Publication type

Proceedings paper

Embargo date

9999-12-31