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Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications
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Authors
Rodriguez, Leonard
;
Adelmann, Christoph
;
Sutens, Ben
;
Winroth, Gustaf
;
Delabie, Annelies
;
Gronheid, Roel
;
Van Elshocht, Sven
Conference
AVS 60th International Symposium & Exhibition
Title
Molecular Layer Deposition of organic-inorganic hybrid materials for implant BARC applications
Publication type
Meeting abstract
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