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Meta-materials approach to sensitivity enhancement of MEMS BAW resonant sensors

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorZanaty, Mohamed
dc.contributor.authorKhaled, Ahmed
dc.contributor.authorJansen, Roelof
dc.contributor.authorCherman, Vladimir
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-21T11:34:05Z
dc.date.available2021-10-21T11:34:05Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23017
dc.sourceIIOimport
dc.titleMeta-materials approach to sensitivity enhancement of MEMS BAW resonant sensors
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage7726
dc.source.conferenceIEEE Sensors Conference
dc.source.conferencedate3/11/2013
dc.source.conferencelocationBaltimore, MD USA
imec.availabilityPublished - imec


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