Show simple item record

Integrating a hydrogen silsesquioxane spin-on dielectric in a quarter micron technology

dc.contributor.authorWaeterloos, Joost
dc.contributor.authorMeynen, Herman
dc.contributor.authorCoenegrachts, Bart
dc.contributor.authorGao, Teng
dc.contributor.authorGrillaert, Joost
dc.contributor.authorVan den hove, Luc
dc.date.accessioned2021-09-30T10:05:52Z
dc.date.available2021-09-30T10:05:52Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2301
dc.sourceIIOimport
dc.titleIntegrating a hydrogen silsesquioxane spin-on dielectric in a quarter micron technology
dc.typeProceedings paper
dc.contributor.imecauthorCoenegrachts, Bart
dc.contributor.imecauthorVan den hove, Luc
dc.source.peerreviewno
dc.source.beginpage310
dc.source.endpage316
dc.source.conference3rd International Dielectrics for ULSI Multilevel Interconnection Conference - DUMIC
dc.source.conferencedate10/02/1997
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record