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Voltage driven electro-thermo-mechanical self-oscillator

dc.contributor.authorSafouene, Ouenzerfi
dc.contributor.authorTilmans, Harrie
dc.contributor.authorEl-borgi, Sami
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-21T11:40:10Z
dc.date.available2021-10-21T11:40:10Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23031
dc.sourceIIOimport
dc.titleVoltage driven electro-thermo-mechanical self-oscillator
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.conferenceMicromechanics and Microsystems Europe Conference - MME
dc.source.conferencedate1/09/2013
dc.source.conferencelocationEspoo Finland
imec.availabilityPublished - imec


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