dc.contributor.author | Schulze, Andreas | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Verhulst, Anne | |
dc.contributor.author | Rooyackers, Rita | |
dc.contributor.author | Vandooren, Anne | |
dc.contributor.author | Mody, Jay | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-21T11:52:35Z | |
dc.date.available | 2021-10-21T11:52:35Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23059 | |
dc.source | IIOimport | |
dc.title | AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Verhulst, Anne | |
dc.contributor.imecauthor | Vandooren, Anne | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.contributor.orcidimec | Verhulst, Anne::0000-0002-3742-9017 | |
dc.contributor.orcidimec | Vandooren, Anne::0000-0002-2412-0176 | |
dc.source.peerreview | no | |
dc.source.beginpage | Y6.01 | |
dc.source.conference | MRS Spring Meeting Symposium Y: Advances in Scanning Probe Microscopy for Imaging Functionality on the Nanoscale | |
dc.source.conferencedate | 1/04/2013 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |