Show simple item record

AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale

dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorEyben, Pierre
dc.contributor.authorVerhulst, Anne
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVandooren, Anne
dc.contributor.authorMody, Jay
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-21T11:52:35Z
dc.date.available2021-10-21T11:52:35Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23059
dc.sourceIIOimport
dc.titleAFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale
dc.typeMeeting abstract
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.source.peerreviewno
dc.source.beginpageY6.01
dc.source.conferenceMRS Spring Meeting Symposium Y: Advances in Scanning Probe Microscopy for Imaging Functionality on the Nanoscale
dc.source.conferencedate1/04/2013
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record