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Comparative study of stress inducing layers to produce kerfless thin wafers by the slim-cut technique

dc.contributor.authorSerra, Joo Manuel
dc.contributor.authorBellanger, Pierre
dc.contributor.authorLobato, Killian
dc.contributor.authorMartini, Roberto
dc.contributor.authorDebucquoy, Maarten
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-21T11:57:34Z
dc.date.available2021-10-21T11:57:34Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23070
dc.sourceIIOimport
dc.titleComparative study of stress inducing layers to produce kerfless thin wafers by the slim-cut technique
dc.typeProceedings paper
dc.contributor.imecauthorDebucquoy, Maarten
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecDebucquoy, Maarten::0000-0001-5980-188X
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.conference39th IEEE Photovoltaic Specialists Conference - PVSC
dc.source.conferencedate16/06/2013
dc.source.conferencelocationTampa, FL USA
imec.availabilityPublished - imec


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