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Si cap passivation for Ge nMOs applications

dc.contributor.authorSioncke, Sonja
dc.contributor.authorVanherle, Wendy
dc.contributor.authorArt, Wim
dc.contributor.authorCeuppens, Joris
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorLin, Dennis
dc.contributor.authorDelabie, Annelies
dc.contributor.authorConard, Thierry
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorCaymax, Matty
dc.contributor.authorCollaert, Nadine
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-21T12:10:09Z
dc.date.available2021-10-21T12:10:09Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23096
dc.sourceIIOimport
dc.titleSi cap passivation for Ge nMOs applications
dc.typeMeeting abstract
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorArt, Wim
dc.contributor.imecauthorCeuppens, Joris
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage78
dc.source.endpage79
dc.source.conferenceINFOS Book of Abstracts
dc.source.conferencedate25/06/2013
dc.source.conferencelocationCracow Poland
imec.availabilityPublished - open access


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