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Improved fabrication process for III-V based optical Interconnects on silicon

dc.contributor.authorSpuesens, Thijs
dc.contributor.authorRegreny, Philippe
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-21T12:18:23Z
dc.date.available2021-10-21T12:18:23Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23114
dc.sourceIIOimport
dc.titleImproved fabrication process for III-V based optical Interconnects on silicon
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage154
dc.source.endpage155
dc.source.conferenceIEEE 10th International Conference on Group IV Photonics - GFP
dc.source.conferencedate28/08/2013
dc.source.conferencelocationSeoul South-Korea
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6644417&refinements%3D4281272348%26sortType%3Dasc_p_Sequence%26filter
imec.availabilityPublished - open access


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