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Nano goes macro - Nanoimprint lithography at the transition from small to large-area production
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Authors
Stadlober, Barabara
;
Nees, Dieter
;
Lintschnig, Andre
;
Belegratis, Maria
;
Gold, Herbert
;
Haase, Anja
;
Fian, Alexander
;
Schindler, Axel
;
Drost, Andreas
;
Koenig, Martin
;
Zanella, Frederic
;
Marjanovic, Nenad
;
Ring, Johan
;
Lee, Ki-Dong
;
Muller, Robert
;
Genoe, Jan
;
Hirshy, Hassan
;
Pretot, Roger
Conference
MRS Fall Meeting Symposium M: Large-Area Processing and Patterning for Active Optical and Electronic Devices
Title
Nano goes macro - Nanoimprint lithography at the transition from small to large-area production
Publication type
Oral presentation
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