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Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)

dc.contributor.authorStesmans, Andre
dc.contributor.authorNguyen, A.
dc.contributor.authorHoussa, Michel
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T12:21:35Z
dc.date.available2021-10-21T12:21:35Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23121
dc.sourceIIOimport
dc.titleElectron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)
dc.typeJournal article
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage240
dc.source.endpage243
dc.source.journalMicroelectronic Engineering
dc.source.volume109
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931713002955
imec.availabilityPublished - open access


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