Authors

Stesmans, Andre; Nguyen, A.; Houssa, Michel; Afanasiev, Valeri; Tokei, Zsolt; Baklanov, Mikhaïl

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

109

Title

Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)

Publication type

Journal article

Embargo date

9999-12-31