Publication:
Electron spin resonance analysis of sputtering-induced defects in advanced low-k insulators (k-2.0-2.5)
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1787 since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1787 since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations