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Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line

dc.contributor.authorSubramanian, Ananth
dc.contributor.authorNeutens, Pieter
dc.contributor.authorDhakal, Ashim
dc.contributor.authorJansen, Roelof
dc.contributor.authorClaes, Tom
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorPeyskens, Frederic
dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorHelin, Philippe
dc.contributor.authorDu Bois, Bert
dc.contributor.authorLeyssens, Kenny
dc.contributor.authorSeveri, Simone
dc.contributor.authorDeshpande, Paru
dc.contributor.authorBaets, Roel
dc.contributor.authorVan Dorpe, Pol
dc.date.accessioned2021-10-21T12:26:36Z
dc.date.available2021-10-21T12:26:36Z
dc.date.issued2013
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23132
dc.sourceIIOimport
dc.titleLow-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line
dc.typeJournal article
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorPeyskens, Frederic
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorLeyssens, Kenny
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDeshpande, Paru
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecDeshpande, Paru::0000-0002-9693-5761
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecPeyskens, Frédéric::0000-0002-6116-1102
dc.source.peerreviewyes
dc.source.beginpage2202809
dc.source.journalIEEE Photonics Journal
dc.source.issue6
dc.source.volume5
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6674990
imec.availabilityPublished - imec


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