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Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line
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Authors
Subramanian, Ananth
;
Neutens, Pieter
;
Dhakal, Ashim
;
Jansen, Roelof
;
Claes, Tom
;
Rottenberg, Xavier
;
Peyskens, Frederic
;
Selvaraja, Shankar
;
Helin, Philippe
;
Du Bois, Bert
;
Leyssens, Kenny
;
Severi, Simone
;
Deshpande, Paru
;
Baets, Roel
;
Van Dorpe, Pol
ISSN
1943-0655
Issue
6
Journal
IEEE Photonics Journal
Volume
5
Title
Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line
Publication type
Journal article
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