Publication:
Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line
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1968 since deposited on 2021-10-21
Acq. date: 2026-02-26
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Statistics
Views
1968 since deposited on 2021-10-21
Acq. date: 2026-02-26
Citations