Publication:
Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line
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1962 since deposited on 2021-10-21
2last month
Acq. date: 2025-12-10
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Views
1962 since deposited on 2021-10-21
2last month
Acq. date: 2025-12-10
Citations