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Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma

dc.contributor.authorSun, Yiting
dc.contributor.authorArmini, Silvia
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorDe Feyter, Steven
dc.date.accessioned2021-10-21T12:28:48Z
dc.date.available2021-10-21T12:28:48Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23137
dc.sourceIIOimport
dc.titleInvestigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma
dc.typeMeeting abstract
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.beginpageAA5.22
dc.source.conferenceMRS Spring Meeting Symposium AA: Advanced Interconnects for Micro- and Nanoelectronics - Materials, Processes, and Reliability
dc.source.conferencedate1/04/2013
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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