dc.contributor.author | Tamaddon, Amir-Hossein | |
dc.contributor.author | Belmiloud, Naser | |
dc.contributor.author | Doumen, Geert | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-21T12:34:21Z | |
dc.date.available | 2021-10-21T12:34:21Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23149 | |
dc.source | IIOimport | |
dc.title | Evaluation of high-speed linear air-knife based wafer dryer | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tamaddon, Amir-Hossein | |
dc.contributor.imecauthor | Doumen, Geert | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Tamaddon, Amir-Hossein::0000-0003-4566-0697 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 239 | |
dc.source.endpage | 242 | |
dc.source.conference | Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS | |
dc.source.conferencedate | 17/09/2012 | |
dc.source.conferencelocation | Gent Belgium | |
imec.availability | Published - open access | |
imec.internalnotes | Solid State Phenomena; Vol. 195 | |