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New sensitive electrical measurement techniques for the study of stress induced voiding

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorBender, Hugo
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-30T10:08:56Z
dc.date.available2021-09-30T10:08:56Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2314
dc.sourceIIOimport
dc.titleNew sensitive electrical measurement techniques for the study of stress induced voiding
dc.typeOral presentation
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization and Interconnect Systems for ULSI Applications; 30 September - 2 October 1997; San Diego, Calif., USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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