Authors

Tang, Baojun; Toledano Luque, Maria; Zhang, W.D.; Van den Bosch, Geert; Degraeve, Robin; Zhang, J.F.; Van Houdt, Jan

Conference

18th Conference of Insulting Films on Semiconductors - INFOS: Book of Abstracts

Title

Statistical characterization of vertical poly-Si channel using charge pumping technique for 3D flash memory optimization

Publication type

Meeting abstract

Embargo date

9999-12-31