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Silicon & beyond CMOS: The path of advanced electronic structure engineering for low-voltage transistors

dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-21T12:40:52Z
dc.date.available2021-10-21T12:40:52Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23163
dc.sourceIIOimport
dc.titleSilicon & beyond CMOS: The path of advanced electronic structure engineering for low-voltage transistors
dc.typeProceedings paper
dc.contributor.imecauthorThean, Aaron
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XI - UCPSS
dc.source.conferencedate17/09/2012
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vol. 195


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