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Multi-sensors module in SiGeMEMS technology

dc.contributor.authorTilmans, Harrie
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorHelin, Philippe
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorSterken, Tom
dc.contributor.authorRochus, Veronique
dc.contributor.authorYazicioglu, Refet Firat
dc.contributor.authorDonnay, Stephane
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-21T12:43:42Z
dc.date.available2021-10-21T12:43:42Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23168
dc.sourceIIOimport
dc.titleMulti-sensors module in SiGeMEMS technology
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.source.peerreviewyes
dc.source.conferenceSmart Systems Integration Conference - SSI
dc.source.conferencedate13/03/2013
dc.source.conferencelocationAmsterdam The Netherlands
imec.availabilityPublished - imec


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