Scaling of sol-gel PZT ferroelectric capacitors for low-voltage operation
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Norga, Gerd | |
dc.contributor.author | Beckers, Françoise | |
dc.contributor.author | Bogaerts, Lieve | |
dc.contributor.author | Maes, Herman | |
dc.date.accessioned | 2021-09-30T10:09:30Z | |
dc.date.available | 2021-09-30T10:09:30Z | |
dc.date.issued | 1997 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2316 | |
dc.source | IIOimport | |
dc.title | Scaling of sol-gel PZT ferroelectric capacitors for low-voltage operation | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Bogaerts, Lieve | |
dc.source.peerreview | no | |
dc.source.conference | 9th International Symposium on Integrated Ferroelectrics - ISIF | |
dc.source.conferencedate | 3/03/1997 | |
dc.source.conferencelocation | Santa Fe, NM USA | |
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |