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Scaling of sol-gel PZT ferroelectric capacitors for low-voltage operation

dc.contributor.authorWouters, Dirk
dc.contributor.authorNorga, Gerd
dc.contributor.authorBeckers, Françoise
dc.contributor.authorBogaerts, Lieve
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-30T10:09:30Z
dc.date.available2021-09-30T10:09:30Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2316
dc.sourceIIOimport
dc.titleScaling of sol-gel PZT ferroelectric capacitors for low-voltage operation
dc.typeOral presentation
dc.contributor.imecauthorBogaerts, Lieve
dc.source.peerreviewno
dc.source.conference9th International Symposium on Integrated Ferroelectrics - ISIF
dc.source.conferencedate3/03/1997
dc.source.conferencelocationSanta Fe, NM USA
imec.availabilityPublished - imec


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