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Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium

dc.contributor.authorTurk, Michael
dc.contributor.authorRock, Simon
dc.contributor.authorAmanapu, Hari
dc.contributor.authorTeugels, Lieve
dc.contributor.authorRoy, Dipankar
dc.date.accessioned2021-10-21T12:58:26Z
dc.date.available2021-10-21T12:58:26Z
dc.date.issued2013-03
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23197
dc.sourceIIOimport
dc.titleInvestigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium
dc.typeJournal article
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.source.peerreviewyes
dc.source.beginpageP205
dc.source.endpageP213
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue5
dc.source.volume2
dc.identifier.urlhttp://jss.ecsdl.org/content/2/5/P205.full
imec.availabilityPublished - imec


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