Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium
Metadata
Show full item record
Authors
Turk, Michael
;
Rock, Simon
;
Amanapu, Hari
;
Teugels, Lieve
;
Roy, Dipankar
ISSN
2162-8769
Issue
5
Journal
ECS Journal of Solid State Science and Technology
Volume
2
Title
Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium
Publication type
Journal article
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login