Publication:

Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium

Date

2013-03
Journal article
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dc.contributor.authorTurk, Michael
dc.contributor.authorRock, Simon
dc.contributor.authorAmanapu, Hari
dc.contributor.authorTeugels, Lieve
dc.contributor.authorRoy, Dipankar
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.date.accessioned2021-10-21T12:58:26Z
dc.date.available2021-10-21T12:58:26Z
dc.date.issued2013-03
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23197
dc.identifier.urlhttp://jss.ecsdl.org/content/2/5/P205.full
dc.source.beginpageP205
dc.source.endpageP213
dc.source.issue5
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume2
dc.title

Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium

dc.typeJournal article
dspace.entity.typePublication
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