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Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams

dc.contributor.authorUedono, A.
dc.contributor.authorKirimura, T.
dc.contributor.authorWilson, Chris
dc.contributor.authorCroes, Kristof
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorOshima, N.
dc.contributor.authorSuzuki, R.
dc.date.accessioned2021-10-21T13:00:21Z
dc.date.available2021-10-21T13:00:21Z
dc.date.issued2013
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23201
dc.sourceIIOimport
dc.titleVacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams
dc.typeJournal article
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage74510
dc.source.journalJournal of Applied Physics
dc.source.issue7
dc.source.volume114
imec.availabilityPublished - open access


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