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Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams
Publication:
Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams
Date
2013
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Uedono, A.
;
Kirimura, T.
;
Wilson, Chris
;
Croes, Kristof
;
Demuynck, Steven
;
Tokei, Zsolt
;
Oshima, N.
;
Suzuki, R.
Journal
Journal of Applied Physics
Abstract
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2049
since deposited on 2021-10-21
Acq. date: 2025-10-27
Citations
Metrics
Views
2049
since deposited on 2021-10-21
Acq. date: 2025-10-27
Citations