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Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams

Date

2013
Journal article
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dc.contributor.authorUedono, A.
dc.contributor.authorKirimura, T.
dc.contributor.authorWilson, Chris
dc.contributor.authorCroes, Kristof
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorOshima, N.
dc.contributor.authorSuzuki, R.
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-21T13:00:21Z
dc.date.available2021-10-21T13:00:21Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23201
dc.source.beginpage74510
dc.source.issue7
dc.source.journalJournal of Applied Physics
dc.source.volume114
dc.title

Vacancy reactions near the interface between electroplated Cu and barrier metal layers studied by monoenergetic positron beams

dc.typeJournal article
dspace.entity.typePublication
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