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2D and 3D photoresist line roughness characterization
Publication:
2D and 3D photoresist line roughness characterization
Date
2013
Journal article
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27237.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vaglio Pret, Alessandro
;
Kunnen, Eddy
;
Gronheid, Roel
;
Pargon, Erwine
;
Luere, Olivier
;
Bianchi, Davide
Journal
Microelectronic Engineering
Abstract
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1980
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1980
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations