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Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness

dc.contributor.authorVan den Berg, Jaap
dc.contributor.authorReading, Michael
dc.contributor.authorBailey, Paul
dc.contributor.authorNoakes, Tim
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTielens, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-21T13:13:18Z
dc.date.available2021-10-21T13:13:18Z
dc.date.issued2013
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23227
dc.sourceIIOimport
dc.titleMedium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage8
dc.source.endpage16
dc.source.journalApplied Surface Science
dc.source.volume281
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0169433213002961
imec.availabilityPublished - imec


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