Publication:
Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness
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1859 since deposited on 2021-10-21
1last month
Acq. date: 2026-10-08
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Statistics
Views
1859 since deposited on 2021-10-21
1last month
Acq. date: 2026-10-08
Citations