Authors

Van den Berg, Jaap; Reading, Michael; Bailey, Paul; Noakes, Tim; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Conard, Thierry; De Gendt, Stefan; Van Elshocht, Sven

ISSN

0169-4332

Journal

Applied Surface Science

Volume

281

Title

Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness

Publication type

Journal article