Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness

dc.contributor.author	Van den Berg, Jaap
dc.contributor.author	Reading, Michael
dc.contributor.author	Bailey, Paul
dc.contributor.author	Noakes, Tim
dc.contributor.author	Adelmann, Christoph
dc.contributor.author	Popovici, Mihaela Ioana
dc.contributor.author	Tielens, Hilde
dc.contributor.author	Conard, Thierry
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Van Elshocht, Sven
dc.contributor.imecauthor	Adelmann, Christoph
dc.contributor.imecauthor	Popovici, Mihaela Ioana
dc.contributor.imecauthor	Tielens, Hilde
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.imecauthor	Van Elshocht, Sven
dc.contributor.orcidimec	Adelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimec	Van Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned	2021-10-21T13:13:18Z
dc.date.available	2021-10-21T13:13:18Z
dc.date.issued	2013
dc.identifier.issn	0169-4332
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23227
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0169433213002961
dc.source.beginpage	8
dc.source.endpage	16
dc.source.journal	Applied Surface Science
dc.source.volume	281
dc.title	Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness
dc.type	Journal article
dspace.entity.type	Publication
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