dc.contributor.author | van Dorp, Dennis | |
dc.contributor.author | Arnauts, Sophia | |
dc.contributor.author | Cuypers, Daniel | |
dc.contributor.author | Rip, Jens | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-21T13:22:17Z | |
dc.date.available | 2021-10-21T13:22:17Z | |
dc.date.issued | 2013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23246 | |
dc.source | IIOimport | |
dc.title | Nanoscale etching of III-V semiconductors in acidic H2O2 solutions | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | van Dorp, Dennis | |
dc.contributor.imecauthor | Arnauts, Sophia | |
dc.contributor.imecauthor | Rip, Jens | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | van Dorp, Dennis::0000-0002-1085-4232 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2130 | |
dc.source.conference | 224th ECS Fall Meeting | |
dc.source.conferencedate | 28/10/2013 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Meeting Abstracts; Vol. MA2013-02 | |