Cleaning of III-V materials: surface chemistry considerations

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Authors
van Dorp, Dennis; Cuypers, Daniel; Arnauts, Sophia; Mertens, Paul; De Gendt, Stefan
Conference
Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS
Title
Cleaning of III-V materials: surface chemistry considerations
Publication type
Proceedings paper
Embargo date
9999-12-31
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