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Cleaning of III-V materials: surface chemistry considerations
Publication:
Cleaning of III-V materials: surface chemistry considerations
Date
2013
Proceedings Paper
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28098.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Dorp, Dennis
;
Cuypers, Daniel
;
Arnauts, Sophia
;
Mertens, Paul
;
De Gendt, Stefan
Journal
Abstract
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1890
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Citations
Metrics
Views
1890
since deposited on 2021-10-21
418
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations