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3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorKumar, Arul
dc.contributor.authorGilbert, Matthieu
dc.date.accessioned2021-10-21T13:41:22Z
dc.date.available2021-10-21T13:41:22Z
dc.date.issued2013
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23286
dc.sourceIIOimport
dc.title3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage69
dc.source.endpage69
dc.source.journalUltramicroscopy
dc.source.issue1
dc.source.volume132
imec.availabilityPublished - imec


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