Publication:
3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
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1957 since deposited on 2021-10-21
2last month
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Acq. date: 2026-01-06
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Views
1957 since deposited on 2021-10-21
2last month
1last week
Acq. date: 2026-01-06
Citations