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3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
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1953 since deposited on 2021-10-21
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Acq. date: 2025-10-25
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Metrics
Views
1953 since deposited on 2021-10-21
415item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations