Publication:

Challenges in BEOL design and materials coping with CPI stress issues for advanced packaging solutions

Date

2013
Meeting abstract
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26352.pdf 1.4 MB

Author(s)

Vandevelde, Bart  
;
Ivankovic, Andrej
;
Debecker, Bjorn
;
Lofrano, Melina  
;
Vanstreels, Kris  
;
Cherman, Vladimir  
;
Gonzalez, Mario  
;
Van der Plas, Geert  
;
De Wolf, Ingrid  
;
Beyne, Eric  
;
Tokei, Zsolt  

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Abstract

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2003 since deposited on 2021-10-21
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