Authors

Vandevelde, Bart; Ivankovic, Andrej; Debecker, Bjorn; Lofrano, Melina; Vanstreels, Kris; Cherman, Vladimir; Gonzalez, Mario; Van der Plas, Geert; De Wolf, Ingrid; Beyne, Eric; Tokei, Zsolt

Conference

Materials for Advance Metallization - MAM

Title

Challenges in BEOL design and materials coping with CPI stress issues for advanced packaging solutions

Publication type

Meeting abstract

Embargo date

9999-12-31