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Effect of pore structure of nanometer scale porous films on the measured elastic modulus

dc.contributor.authorVanstreels, Kris
dc.contributor.authorWu, Chen
dc.contributor.authorGonzalez, Mario
dc.contributor.authorSchneider, Dieter
dc.contributor.authorGidley, David
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-21T13:52:06Z
dc.date.available2021-10-21T13:52:06Z
dc.date.issued2013
dc.identifier.issn0743-7463
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23308
dc.sourceIIOimport
dc.titleEffect of pore structure of nanometer scale porous films on the measured elastic modulus
dc.typeJournal article
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.beginpage12025
dc.source.endpage12035
dc.source.journalLangmuir
dc.source.issue38
dc.source.volume29
dc.identifier.urlhttp://pubs.acs.org/doi/abs/10.1021/la402383g?prevSearch=vanstreels&searchHistoryKey=
imec.availabilityPublished - imec


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