Authors

Verdonck, Patrick; Maheshwari, Abhishek; Swerts, Johan; Tielens, Hilde; Franquet, Alexis; Loyo Prado, Jana; Armini, Silvia; Baklanov, Mikhaïl; Van Elshocht, Sven; Uedono, Akira; Roque Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Kellerman, Guinther

ISSN

2162-8769

Issue

5

Journal

ECS Journal of Solid State Science and Technology

Volume

2

Title

Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material

Publication type

Journal article

Embargo date

9999-12-31