Publication:

Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material

Date

2013
Journal article
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Author(s)

Verdonck, Patrick  
;
Maheshwari, Abhishek
;
Swerts, Johan  
;
Tielens, Hilde  
;
Franquet, Alexis  
;
Loyo Prado, Jana  
;
Armini, Silvia  
;
Baklanov, Mikhaïl
;
Van Elshocht, Sven  
;
Uedono, Akira
;
Roque Huanca, Danilo
;
Gomes dos Santos Filho, Sebastiao
;
Kellerman, Guinther

Journal

ECS Journal of Solid State Science and Technology

Abstract

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