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Conformal deposition For 3D thin-film batteries

dc.contributor.authorVereecken, Philippe
dc.contributor.authorHuyghebaert, Cedric
dc.date.accessioned2021-10-21T14:07:23Z
dc.date.available2021-10-21T14:07:23Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23335
dc.sourceIIOimport
dc.titleConformal deposition For 3D thin-film batteries
dc.typeProceedings paper
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage111
dc.source.endpage118
dc.source.conferenceAtomic Layer Deposition Applications 9
dc.source.conferencedate27/10/2013
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://ecst.ecsdl.org/content/58/10/111.abstract
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 58, Issue 10


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