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A new method to determine the internal pressure and leakage rate of MEMS packages

dc.contributor.authorWang, Bo
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorWevers, Martine
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-21T14:25:32Z
dc.date.available2021-10-21T14:25:32Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23372
dc.sourceIIOimport
dc.titleA new method to determine the internal pressure and leakage rate of MEMS packages
dc.typeProceedings paper
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.conference17th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate16/06/2013
dc.source.conferencelocationBarcelona Spain
imec.availabilityPublished - imec


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