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Integration aspects of strained Ge pFETs
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Authors
Witters, Liesbeth
;
Eneman, Geert
;
Mitard, Jerome
;
Vincent, Benjamin
;
Loo, Roger
;
Hikavyy, Andriy
;
Milenin, Alexey
;
Mertens, Sofie
;
Thean, Aaron
;
Collaert, Nadine
Conference
14th International Conference on Ultimate Integration in Silicon - ULIS
Title
Integration aspects of strained Ge pFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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