Show simple item record

'Just clean enough': wet cleaning for solar cell manufacturing applications

dc.contributor.authorWostyn, Kurt
dc.contributor.authorBaekelant, Wouter
dc.contributor.authorRip, Jens
dc.contributor.authorHaslinger, Michael
dc.contributor.authorKenis, Karine
dc.contributor.authorStruyf, Herbert
dc.contributor.authorClaes, Martine
dc.contributor.authorMertens, Paul
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-21T14:40:56Z
dc.date.available2021-10-21T14:40:56Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23401
dc.sourceIIOimport
dc.title'Just clean enough': wet cleaning for solar cell manufacturing applications
dc.typeProceedings paper
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage293
dc.source.endpage296
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XI - UCPSS
dc.source.conferencedate17/09/2012
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://www.scientific.net/SSP.195.293
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vol. 195


Files in this item

Thumbnail
Name:
25441.pdf
Size:
181.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record