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Carbon nanotube growth for through-silicon via applications

dc.contributor.authorXie, Rongsie
dc.contributor.authorZhang, Can
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorArstila, Kai
dc.contributor.authorHantschel, Thomas
dc.contributor.authorChen, Bingan
dc.contributor.authorZhong, Guofang
dc.contributor.authorRobertson, John
dc.date.accessioned2021-10-21T14:44:04Z
dc.date.available2021-10-21T14:44:04Z
dc.date.issued2013
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23407
dc.sourceIIOimport
dc.titleCarbon nanotube growth for through-silicon via applications
dc.typeJournal article
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage125603
dc.source.journalNanotechnology
dc.source.issue12
dc.source.volume24
imec.availabilityPublished - open access


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