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Capturing wetting states in nanopatterned silicon

dc.contributor.authorXu, XiuMei
dc.contributor.authorVereecke, Guy
dc.contributor.authorChen, Chang
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorArmini, Silvia
dc.contributor.authorVerellen, Niels
dc.contributor.authortsai, Wei-Kang
dc.contributor.authorStruyf, Herbert
dc.contributor.authorHolsteyns, Frank
dc.contributor.authormachalkov, victor
dc.contributor.authorindekeu, joseph
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-21T14:48:17Z
dc.date.available2021-10-21T14:48:17Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23414
dc.sourceIIOimport
dc.titleCapturing wetting states in nanopatterned silicon
dc.typeMeeting abstract
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorVerellen, Niels
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerellen, Niels::0000-0001-5110-4158
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceNanoscale Fluid Mechanics and Interfacial Water Workshop
dc.source.conferencedate12/11/2013
dc.source.conferencelocationSingapore Singapore
imec.availabilityPublished - imec


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