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Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

dc.contributor.authorZekry, Joseph
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorWang, Bo
dc.contributor.authorEl Ghannudi, Hamza
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-21T14:59:45Z
dc.date.available2021-10-21T14:59:45Z
dc.date.issued2013-01
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23435
dc.sourceIIOimport
dc.titleDesign, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes
dc.typeJournal article
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage218
dc.source.endpage232
dc.source.journalSensors and Actuators A: Physical
dc.source.volume189
dc.identifier.urlhttp://dx.doi.org/10.1016/j.sna.2012.09.034
imec.availabilityPublished - imec


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