Authors

Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Cherman, Vladimir; Varela Pedreira, Olalla; Wang, Bo; El Ghannudi, Hamza; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie

ISSN

0924-4247

Journal

Sensors and Actuators A: Physical

Volume

189

Title

Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

Publication type

Journal article