Publication:

Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

Date

2013-01
Journal article
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dc.contributor.authorZekry, Joseph
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorWang, Bo
dc.contributor.authorEl Ghannudi, Hamza
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-21T14:59:45Z
dc.date.available2021-10-21T14:59:45Z
dc.date.issued2013-01
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23435
dc.identifier.urlhttp://dx.doi.org/10.1016/j.sna.2012.09.034
dc.source.beginpage218
dc.source.endpage232
dc.source.journalSensors and Actuators A: Physical
dc.source.volume189
dc.title

Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

dc.typeJournal article
dspace.entity.typePublication
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