Publication:

Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

Date

2013-01
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Zekry, Joseph
;
Sabuncuoglu Tezcan, Deniz  
;
Cherman, Vladimir  
;
Varela Pedreira, Olalla  
;
Wang, Bo  
;
El Ghannudi, Hamza
;
Celis, Jean-Pierre
;
Puers, Bob  
;
Van Hoof, Chris  
;
Tilmans, Harrie  

Journal

Sensors and Actuators A: Physical

Abstract

Description

Statistics

Views

1890 since deposited on 2021-10-21
1last month
Acq. date: 2026-03-13

Citations

Statistics

Views

1890 since deposited on 2021-10-21
1last month
Acq. date: 2026-03-13

Citations