Publication:

Design, fabrication and testing of wafer-level thin film vacuum packages for MEMS based on nanoporous alumina membranes

Date

2013-01
Journal article
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Author(s)

Zekry, Joseph
;
Sabuncuoglu Tezcan, Deniz  
;
Cherman, Vladimir  
;
Varela Pedreira, Olalla  
;
Wang, Bo  
;
El Ghannudi, Hamza
;
Celis, Jean-Pierre
;
Puers, Bob  
;
Van Hoof, Chris  
;
Tilmans, Harrie  

Journal

Sensors and Actuators A: Physical

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1889 since deposited on 2021-10-21
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Acq. date: 2026-01-09

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